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Tokyo Electron (TEL), the world’s second largest supplier of semiconductor production equipment (SPE), today announced the company has acquired Epion Corporation, supplier of gas cluster ion beam (GCIB) technology for diverse semiconductor applications and emerging nanotechnology markets.Epion’s GCIB is a highly versatile atomic-scale processing technique that is ideal for production applications where surface and film quality are crucial. Key applications for GCIB include etching, smoothing, doping and physical and chemical surface modification.
“As our customers continue to aggressively shrink geometries and adopt new materials and novel device structures, we believe Epion’s unique technology will find its way into several high volume production applications,” said Lou Steen, VP of Marketing for TEL US and newly-appointed president of TEL Epion. “We believe that TEL’s worldwide service and support organizations will greatly enhance customer satisfaction of Epion’s nFusion™ System and Ultra Trimmer™ products.”
“Epion is very pleased to become part of TEL. We expect that TEL’s position as a leading global supplier of semiconductor production equipment will accelerate customer acceptance of Epion technology,” said Allen Kirkpatrick, founder and CEO of Epion.
“We believe that Epion's advanced process technology will truly be an asset to TEL's position in the semiconductor industry. We are eager to move forward in a collaborative effort with our customers and to integrate the benefits of Epion's unique gas ion beam technology,” said Ken Sato, president of Tokyo Electron Limited.
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